Luhlobo loPhuculo lwe-EM8000, kunye nokuphuculwa kokukhawulezisa ityhubhu ye-E-Beam, iyahluka kwimowudi yokuphuma, iyafumaneka ukuze ibone isampulu engaqhubekiyo kumbane ombane ophantsi ngaphandle kokutshiza, kulula, ukulungeleka kunye nobuchule benkqubo yokusebenza, isicwangciso solungiso sokulungiswa okuninzi. Ikwayi-FEG SEM yokuqala enesisombululo kwi-1nm (30kV).
Izinto eziluncedo:
1, umpu we-Schittky electron, ukukhanya okuphezulu, i-monochromaticity elungileyo, indawo encinci yomqadi, ixesha elide lobomi.
2, kunye ne-E-beam tube accelaration, inqanaba lokuncipha lokuncipha
I-3, i-Stam beam yangoku, ukusasazeka kwamandla
4, Isampulu engahambisiyo yokujonga ngaphandle kokutshiza kumbane ophantsi
I-5, ilula, ilula kwaye inobuhlobo bokusebenza
I-6, i-Huge 5 i-axes isigaba seenjini
Ukucaciswa:
Uqwalaselo | |
Isigqibo | 1nm @ 30kV (SE) |
3nm @ 1Kv (SE) | |
2.5nm@30kV (BSE) | |
Ukukhulisa | 15x-800,000x |
Ukukhawulezisa iVoltage | 0-30kV eqhubekayo kunye adjustable |
Umbane we-Electron | Umpu wokukhutshwa kwebala laseSchottky |
UCathode Emitter | Tungsten mono-yikristale |
Iinqununu ezintlanu ze-Eucentric Auto Stage | X: 0 ~ 150mm |
Y: 0 ~ 150mm | |
Z: 0 ~ 60mm | |
R: 360 ° | |
T: -5 °~75 ° | |
Uhlobo lweMax | 320mm |
L * W * H | 342mm * 324mm * 320mm (ngaphakathi kwigumbi ubungakanani) |